Gare d'appalto
Advanced methodologies for micro and nano-electronic devices
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This research activity aims to the realization of electronic devices through the use of innovative methodologies, both experimental and theoretical. It is organized through some main branches in the field of micro and nanostructures, from the synthesis of Carbon nanostructures, purification and nano-manipulation for applications in nanoelectronic and sensing technologies, to the realization of Si based microelectronics on plastic substrate, for flexible low cost electronics to be integrated in displays, clothes, goods. Furthermore, high efficiency photovoltaic materials and processing, based on Si nanocrystals, Si thin films crystallized by infra-red laser beam, hybrid inorganic/organic structures, is pursued. The experimental activities are sustained by the development of theoretical models and relative numerical codes for the description of the observed phenomena and the design of experiments and devices. |
| Group Leader: Antonino La Magna |
Research staff
A. Alberti, A. La Magna, G. Mannino, V. Privitera, S. Scalese, M. Italia, A. Marino, A. Spada,
V. Scuderi, G. Pellegrino, S. Bagiante, I. Deretzis, G. Fisicaro, R. Ruggeri, L. Chiaramonte
Photovoltaic cells based on nanostructures
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We aim to exploit the properties of the quantum confinement of Silicon quantum dots (Si-QD) and to use an IR 808nm laser source for heat treatments. The use of Si-QD is expected to increase efficiency in the conversion of solar energy. Through the effects of quantum confinement, in fact, you can get adjustable bandgap materials that absorb photons in a wider and selected range of energies. The study of formation and structural properties of nano crystals of Si is carried out through X-ray diffraction and scattering using a high angular resolution diffractometer and through Electron Energy Loss Spectroscopy. The realization of Si-QD with traditional techniques, like high temperature furnace treatments, rules out the possibility of making solar cells on substrates other than Si. Instead, depositing Si and its compounds at low temperature (e.g. 70 °C) by an Inductively Coupled Plasma Chemical Vapor Deposition and subsequently treating the material with "laser annealing” allows to make QD on glass or ceramic substrates. Achieving this goal would have the double advantage of combining the increased efficiencies provided by the QD with the low cost of the substrate allowing for the integration of cells in buildings. Contact person: Giovanni Mannino |
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To further reduce production costs and lighten the weight of the cells, hybrid solar cells based on polymeric materials are the best candidates. This type of cells represents a challenge for the scientific community since their conversion efficiency of solar radiation is still low, below 8%. As a possible scheme, we plan to incorporate transparent polycrystalline TiO2 layers, deposited by DC magnetron sputtering and having the structure of anatase, with a mixture of donor and acceptor polymers (e.g. Poly 3-Hexylthiophene (P3HT)) and a soluble form of conjugated polymers blended with fullerenes (PCBM). In this way we obtain a double heterojunction device, with interfaces TiO2/P3HT and P3HT/PCBM as the site of charge separation. The role of TiO2 in the hybrid cell is crucial, and is linked to its ability to accept and carry electrons from the active material. We plan to use TiO2 either as a continuous layer in multilayer structures or as mesoporous material (e.g. nanotubes) in multilayered structures organic / inorganic. The deposition of mesoporous TiO2 by sputtering is a recent and critical task that requires a systematic study on the optimization and implementation of its structural and optical properties. The structural characterization of TiO2 as a function of growth parameters is performed via X-ray techniques using a high angular resolution diffractometer. The analysis will provide detailed information on the nature of the material (polycrystalline or amorphous) and on the crystal structure, the density, thickness and roughness. Contact person: Alessandra Alberti |
Research staff
Giovanni Mannino (Researcher)
Alessandra Alberti (Researcher)
Rosa Ruggeri (PhD student)
Giovanna Pellegrino (Research fellow)
Antonio Marino (Technician)
Materials and processing for flexible electronics on plastic
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The activity concerns the issue of metal contacts integration in flexible electronics and focuses on low temperature formation of thin layers of Ni-silicide as source and drain of Thin Film Transistors (TFT) on polymeric substrate. The conventional TFT architecture would require highly doped Si for the source and drain area to be realised at temperatures above 1000 °C. The idea of replacing such doped regions with Ni-silicide metallic contacts arises from the incompatibility of high temperature processes with the stability of the polymeric substrate. By using silicided source and drain area, the physical mechanisms ruling the device operation are modified, as the charge carriers are transferred from the source to the conduction channel through a Schottky barrier. In this configuration the short channel effects can be neglected and also the parasitic capacitance is lowered, even reducing the device size. Using Ni-silicides offers some other crucial advantages: the flow-chart is simplified by avoiding ion implantation and dopant activation; the contact can be realised at temperatures below 350 °C; the metallic layers can be selectively obtained on the source and drain regions, through a so called self-aligned process. We have realised Ni-Silicide contacts via Ni deposition by DC magnetron sputtering on PECVD amorphous silicon on PEN or Polymmide (plastics), and via subsequent irradiation of the contact area by an excimer laser (ELA) with wavelength of 308 nm. ELA is a process compatible with the presence of the polymer in the structure, as this radiation is absorbed in Si within a distance of ~ 20 nm.. Heat is transferred from Si to the polymer and induces an increase of temperature up to ~ 600 °C only for a few μs, as evaluated by phase field calculations, such that no detrimental modification of the elastic characteristics of the polymer occurs. ELA promoted both the reaction between Ni and silicon in the contact area, and the crystallization of the substrate. The resulting silicide layer is continuously distributed all over the contact area offering the advantage of smoothing the surface from the roughness induced by the Si crystallization process. The Schottky barrier between silicide and silicon can be tuned from a quasi ohmic (low barrier) to a rectifiant behaviour (high barrier) b y changing the structural properties of the silicide Contact person: Alessandra Alberti |
Projects related to the activity
IMM participates to a National project, on the establishment of a public-private Laboratory for the development of plastic electronic technologies, funded by the Italian Ministry of Research *(MIUR), named "Laboratorio pubblico-privato per lo sviluppo di tecnologie di processo e dimostratori di circuiti elettronici ad alte prestazioni e basso costo di fabbricazione realizzati su susbtrato plastico"* (PLAST_ICs); DM17767, starting date 1/1/2006, end 31/12/2014.
C-based Nanostructures
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Over the past few years, the interest for the nano-sized C-based materials has received a growing interest, due to peculiar properties that may lead to several applications in electronic devices and sensors. This class of materials ranges from carbon-based hard materials, such as diamondlike carbon and carbon nitride thin films, to carbon nanotubes (CNTs) and linear carbon chains (LCCs). The activity on C-based Nanostructures at IMM-CNR in Catania started in 2005. In particular, we have focused our attention on the synthesis of CNTs by RF magnetron sputtering, that is a technique not commonly used for this purpose, and arc discharge in liquid environments. Arc discharge in gaseous environments is much more used for the CNT production, with respect to the same technique in liquids. Nevertheless, in both cases, not so much is known as concerns the process itself and the role of the experimental parameters on the control of the produced structures.
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One of the aims of our study is to find such a correlation between the discharge parameters and the nanostructures produced. In particular, we have already found the suitable parameters in order to obtain the formation of hybrid systems, formed by LCCs inserted in CNTs, by arc discharge in liquid nitrogen. Contact person: Silvia Scalese |
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Research staff
Silvia Scalese (Researcher)
Viviana Scuderi (Research fellow)
Salvatore Bagiante (PhD student)
Markus Italia (Technician)
Projects related to the activity
IMM is involved in a two-year National project, PRIN 2007 “Nuove strategie per la sintesi di nanostrutture a base di carbonio mediante la formazione di plasmi in ambienti liquidi” (Protocollo 2007K9YPL8_002); starting date: September 22nd, 2008
Publications
1) Growth of aligned CNx nano-columns on silicon by RF-Magnetron sputtering, S. Scalese, V. Scuderi, F. Simone, A. Pennisi, G. Compagnini, V. Privitera - Carbon 44 (2006) 3113–3148
2) Carbon aligned nano-columns grown by RF magnetron sputtering: the influence of the growth parameters, S. Scalese, V. Scuderi, F. Simone, A. Pennisi, G. Compagnini, C. Bongiorno, V. Privitera - Phys. E Vol. 37, Issues 1-2 , March 2007, Pages 231-235
3) Simultaneous catalyst deposition and growth of aligned carbon nanotubes on SiO2/Si substrates by RF-magnetron sputtering, S. Scalese, V. Scuderi, V. Privitera, A. Pennisi, F. Simone - J. .Appl. Phys. 102, 114905 (2007)
4) Ex-situ and in-situ catalyst deposition for CNT synthesis by RF-magnetron Sputtering, . S. Scalese, V. Scuderi, F. Simone, A. Pennisi, V. Privitera - Phys. E 40, 2243-2246 (2008)
5) Direct observation of the formation of linear C chain/carbon nanotube hybrid systems, V. Scuderi, S. Scalese, S. Bagiante, G. Compagnini, L. D’Urso, V. Privitera - Carbon 47 (2009) 2134-2137
6) Controlled synthesis of CNTs and linear C chains by arc discharge in liquid nitrogen, S. Scalese, V. Scuderi, S. Bagiante, F. Simone, P. Russo, L. D’Urso, G. Compagnini and V. Privitera - J. Appl. Phys. 107 (2010) 014304
7) The Role of Linear Carbon Chains on the Aggregation of Copper, Silver and Gold Nanoparticles, L. D'Urso, G. Grasso, E. Messina, C. Bongiorno, V. Scuderi, S. Scalese, O. Puglisi, G. Spoto, G. Compagnini - The Journal of Physical Chemistry C, 114 (2010) 907-915
8) Role of the growth parameters on the structural order of MWCNTs produced by arc discharge in liquid nitrogen, S. Bagiante, S. Scalese, V. Scuderi, ,L. D’Urso, E. Messina, G. Compagnini, V. Privitera - To be published on “Physica Status Solidi”
9) Synthesis of Carbon nanowires and nanotubes by plasma ignition in liquid environments, G.Compagnini, G. Patanè, L. D’Urso, S. Scalese, V. Scuderi, S. Bagiante, V.Privitera - To be published on Journal of Optoelectronics and Advanced Materials 2010
Proceedings
1) Role of temperature on the morphology and the chemical composition of C-based nanostructures: from nanocolumns to nanotubes, S. Scalese, V. Scuderi, F. Simone, A. Pennisi, G. Compagnini and V. Privitera - Proceedings della 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors - IEEE-RTP 2007, Aci Castello (Catania, Italy), 2-5 Ottobre 2007
2) Raman spectroscopy of carbon nanotubes and nanowires prepared by arc discharge in liquid nitrogen, G. Compagnini, L. D’Urso, P. Russo, S. Scalese, V. Scuderi, V. Privitera - Proceedings of the XXIst International Conference on Raman Spectroscopy p.578 (R.Withnall and B.Z.Chowdhry edts., IM-Publications 2008)
Nano-electronics modeling and numerical methods
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This activity aims to the development and implementation of advanced codes for the simulation of manufacturing processes (e.g. plasma etching, ultra fast thermal annealing) and the electronic transport in nano and molecular devices. The activity has two interconnected characteristics: a) the tight collaboration with the experimental counter-part and b) the use of the multi-scale paradigm in the simulation approach. Indeed, the current research in the micro, nano and molecular electronics generally deals with the investigation of a complex phenomenology which can hardly addressed by a single theoretical methodology. In turn the application of a set of complementary methods (e.g. ab-initio calculations, Molecular Dynamics techniques, Kinetic Monte Carlo simulation, Continuum modeling) appears the most effective and accurate simulation approach. The activity core is the modeling development and implementation which is “per se” relevant. However, we would like to cite some application examples of the developed codes:
Contact person: Antonino La Magna |
Research staff
A. La Magna
I. Deretzis
G. Fisicaro
L. Chiaramonte
Publications 2008-2009
G. Forte, A. La Magna, I. Deretzis, and R. Pucci ‘Ab Initio Prediction of Boron Compounds Arising from Borozene: Structural and Electronic Properties’ Nanoscale Research Letters (2009) DOI 10.1007/s11671-009-9458-8
A. La Magna, I. Deretzis, G. Forte and R. Pucci ‘Conductance distribution in doped and defected graphene nanoribbons’ (2009) Phys. Rev. B 80, 195413
K. Huet, G. Fisicaro, J. Venturini, H. Besaucèle, and A. La Magna ‘Defect kinetics and dopant activation in submicrosecond laser thermal processes’ (2009), Appl. Phys. Lett. 95, 231901
Deretzis I, La Magna A, ‘ Nonequilibrium aspects of armchair graphene nanoribbon conduction’ (2009) MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING Volume: 11 Issue: 5-6 Pages: 190-194
Libertino S, La Magna A ‘Damage Formation and Evolution in Ion-Implanted Crystalline Si’ (2009) MATERIALS SCIENCE WITH ION BEAMS Book Series: Topics in Applied Physics Volume: 116 Pages: 147-212
Nicotra, O.E., La Magna, A., Coffa, S. 'Particle-chain formation in a dc dielectrophoretic trap; reaction-diffusion approach' (2009) Applied Physics Letters, 95, p. 073702
Deretzis, I., La Magna, A. 'Electronic structure of epitaxial graphene nanoribbons on SiC(0001)' (2009) Applied Physics Letters, 95 (6), p. 063111
La Magna, A., Deretzis, I., Privitera, V. 'Insulator-metal transition in biased finite polyyne systems' (2009) European Physical Journal B, 70 (3), p. 311
Nicotra, G., Spinella, C., La Magna, A., Bongiorno, C., Rimini, E. 'Quantitative study of the Si/SiO2 phase separation in substoichiometric silicon oxide films' (2009) Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 159-160 (C), p. 80
La Magna, A., Fisicaro, G., Mannino, G., Privitera, V., Piccitto, G., Svensson, B.G., Vines, L. ' Defect and dopant kinetics in laser anneals of Si (2008)' Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 154-155 (1-3), p. 35
Nicotra, O.E., La Magna, A., Coffa, S. 'A mean field approach to many-particles effects in dielectrophoresis' (2008) Applied Physics Letters, 93 (19), p. 193902
La Magna, A., Deretzis, I., Forte, G., Pucci, R. 'Violation of the single-parameter scaling hypothesis in disordered graphene nanoribbons' (2008) Physical Review B - Condensed Matter and Materials Physics, 78 (15), p. 153405
Forte, G., Grassi, A., Lombardo, G.M., La Magna, A., Angilella, G.G.N., Pucci, R., Vilardi, R. 'Modeling vacancies and hydrogen impurities in graphene: A molecular point of view' (2008) Physics Letters, Section A: General, Atomic and Solid State Physics, 372 (40), pp. 6168-6174
Privitera, V., Scalese, S., La Magna, A., Pecora, A., Cuscunà, M., Maiolo, L., Minotti, A., Simeone, D., Mariucci, L., Fortunato, G., Caristia, L., Mangano, F., Di Marco, S., Camalleri, M., Ravesi, S., Coffa, S., Grimaldi, M.G., De Bastiani, R., Badal, P., Bagiante, S. 'Low-temperature annealing combined with laser crystallization for polycrystalline silicon TFTs on polymeric substrate' (2008) Journal of the Electrochemical Society, 155 (10), p. H764
Mannino, G., La Magna, A., Privitera, V., Christensen, J.S., Vines, L., Svensson, B.G. 'Boron electrical activation in crystalline Si after millisecond nonmelting laser irradiation' (2008) Journal of the Electrochemical Society, 155 (8), p. H603
Deretzis, I., La Magna, A. 'Bias-driven local density of states alterations and transport in ballistic molecular devices' (2008) Journal of Chemical Physics, 128 (16), p. 164706
La Magna, A., Deretzis, I. 'A polaron model of the electronic transport in a nanotube quantum dot' (2008) Physica E: Low-Dimensional Systems and Nanostructures, 40 (7), p. 2289
Deretzis, I., La Magna, A. 'Electronic transport in carbon nanotube based nano-devices' (2008) Physica E: Low-Dimensional Systems and Nanostructures, 40 (7), p. 2333






