Electrical measurements lab
Lab is equipped with three probe stations for measurements on 6, 8, and 12 inches wafers. One probe station is equipped with three-axial Kelvin contacting system and Attoguard shielding system by Cascade Microtech for current and voltage measurements with very low noise. It is also possible to carry out electrical measurements as a function of temperature from 65 to 200 °C on the 8 inches probe station and from 10 to 500 K on small thermostatic chucks, current measurements in the 1 fA – 10 A range, and voltage measurements in the 10 µV – 1100 V range. The instruments allows us to carry out electrical measurements with a time resolution as low as few nanoseconds, and the laboratory is equipped with a network analyzer for frequency measurements up to 20 GHz.
Staff contact: Domenico Corso, Salvo Lombardo
