Scanning electron microscopy lab
Lab is equipped with a ZEISS SUPRA 35 scanning electron microscope (SEM) with a Schottky field emission gun. The acceleration voltage can be varied in the 0.1 – 30 kV range. operating at an acceleration voltage of 200 kV. The instrument achieves a spatial resolution of 1 nm at 20 kV and is equipped with three different detectors: in-lens detector for secondary electrons, E-T chamber detector, and a detector for backscattered electrons. A nano-manipulator system is also installed inside the chamber for electrical measurements on nanometer structures during SEM observations.
Staff contact: Silvia Scalese, Markus Italia
