Micro-Opto-Mechanical devices for various applications are fabricated by mounting micromachined structures, obtained from bulk silicon wafers by Deep Reactive Ion Etching, on optical fibers. In particular, wideband acousto-optical ultrasonic sources and detectors for biomedical applications and an all-optical SiC pressure sensor for engine cylinders have been developed and tested in laboratory environment (TRL 4)

Contact Person: Alberto Roncaglia