Schottky Contacts to Silicon Carbide: Physics, Technology and Applications

Data di pubblicazione: 25 Lug 2018

LibroFonte dati: OPENALEXTipo OpenAlex: book-chapterAccesso chiuso
Autori: Mario Saggio, Simone Rascunà, Filippo Giannazzo, Peter Michael Gammon, Gheorghe Brezeanu, Fabrizio Roccaforte

Understanding the physics and technology of Schottky contacts to Silicon Carbide is important, for both academic and industrial researchers. In fact, the rectifying contact is a tool for studying carrier transport at metal/semiconductor interfaces, as well as forming the main building block of the Schottky Barrier Diode. In this chapter, the physics of metal/SiC rectifying contacts and the technology of 4H-SiC Schottky diodes are reviewed, presenting a survey of relevant results on this topic, from fundamental concepts of Schottky barriers, to practical information for real device fabrication. Selected examples of 4H-SiC Schottky diodes applications are also briefly discussed.

Editore
Materials Research Forum LLC
Fonte
Advancing Silicon Carbide Electronics Technology I: Metal Contacts to Silicon Carbide: Physics, Technology, Applications
Pagine
127-190
Citazioni
25
ID archivio
8d8aab77fe0e3fe236ffb9815e4848b3
Riferimenti
Volume: 37 Pages: 127-190