Optimization of Digital Growth of Thick N-Polar InGaN by MOCVD

Data di pubblicazione: 17 Dic 2019

RivistaFonte dati: OPENALEXTipo OpenAlex: articleAccesso chiuso
Autori: Shubhra S. Pasayat, Cory Lund, Yusuke Tsukada, Massimo Catalano, Lühua Wang, Moon J. Kim, Moon Jae Kim, Shuji Nakamura, S. Keller, Umesh K. Mishra, Umesh Kumar Mishra

Smooth 200 nm thick N-polar InGaN films were grown by metal–organic chemical vapor deposition (MOCVD) on sapphire using a digital approach consisting of a constant In, Ga, and N precursor flow with pulsed injection of H2 into the N2 carrier gas. Using this growth scheme, the H2 injection time was altered and the effect on the morphology and indium incorporation in the films observed. The effect of periodic insertion of additional GaN inter-layers on the surface morphology of the InGaN layers was also studied.

Fonte
Journal of Electronic Materials
Volume
49
Fascicolo
6
Pagine
3450-3454
Citazioni
2
ID archivio
b9c7f82ceeffaa7f2833c0755d073e3b
Riferimenti
Pages: 1-5