Thermal conductivity detector compact Spice model based on experimental measurements and 3D simulations

Data di pubblicazione: 14 Feb 2012

RivistaFonte dati: OPENALEXTipo OpenAlex: articleAccesso chiuso
Autori: F. Rastrello, P. Placidi, A. Scorzoni, Andrea Scorzoni, E. Cozzani, Marco Messina, Ivan Elmi, Stefano Zampolli, G.C. Cardinali, Gian Carlo Cardinali

In this paper a novel compact Spice model of a thermal conductivity detector (TCD) is presented and validated against an extensive experimental characterization and 3D simulations. The TCD used is based on the ultra low power (ULP) technology and it has been electrically characterized with different helium and nitrogen gas flow rates, via a microfluidic experimental setup. Extraction of global electro-thermal parameters, exploited for the development of the Spice model, has been performed by using both 3D electro-thermal FEM simulations made with COMSOL Multyphisics® and experimental measurements. The first result we discuss is the good agreement between 3D FEM simulations of the device, made with COMSOL Multiphysics®, and the experiments, with a maximum error of 2.9% for He flow rate of 9 sccm and around 1.8% for the N2 carrier gas at each considered flow rate. We have demonstrated that …

Fonte
Sensors and Actuators A Physical
Volume
178
Pagine
49-56
Citazioni
4
ID archivio
2d9af19033976a6e4a8f146d9f82e40f
Riferimenti
Volume: 178 Pages: 49-56