CMOS-compatible electro-optical Mach-Zehnder modulator based on the amorphous silicon technology

Data di pubblicazione: 11 Mag 2012

RivistaFonte dati: OPENALEXTipo OpenAlex: conference-paperAccesso chiuso
Autori: Sandro Rao, Giuseppe Coppola, Mariano Gioffrè, Francesco Giuseppe Della Corte

The realization of on-chip optical interconnects requires the integration of active micro-optical devices with microelectronics. However, it is not clear yet how silicon photonics could be integrated within CMOS chips. In this context the non-crystalline forms of silicon, such as laser-annealed polycrystalline and hydrogenated amorphous silicon (a-Si:H), can deserve some advantages as they can be included almost harmlessly everywhere in a CMOS typical run-sheet, yielding low-cost and flexible fabrication. In particular, a-Si:H can be deposited using the CMOS-compatible low temperature plasma enhanced chemical vapour deposition (PECVD) technique, which brings clear advantages particularly for a back-end photonic integrated circuit (PIC) integration. However, till now a-Si:H has been mainly considered for the objective of passive optical elements within a photonic layer at λ=1.55 μm. Only a small number of examples have been reported, in fact, on waveguide integrated active devices. In this paper we detail about an effective refractive index variation obtained through an electrically induced carrier depletion in an as-deposited a-Si:H-based p-i-n waveguiding device. For this device switch-on and switch-off times of ~2 ns were measured allowing a modulation rate higher than 150 MHz.ÿÿ

Fonte
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Volume
8431
Pagine
84310U
Citazioni
0
ID archivio
dd51d4157acbd6ef10aae7ad95803d89
Riferimenti
Volume: 8431 Pages: 84310U