Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO 2
Data di pubblicazione: 1 Gen 2021
A polystyrene homopolymer with narrow molecular weight distribution ( M n = 2.3 ± 0.3 kg mol −1 , Đ = 1.05 ± 0.01) and end-terminated with a phosphorus containing moiety has been used to form P δ-layers embedded into a SiO 2 matrix.
