Large Area Visible Blind 4H-SiC P+/N UV Photodiode Obtained by Aluminium Implantation
Data di pubblicazione: 1 Gen 2016
ConvegnoFonte dati: ARCHIVIO
4H-SiC junction photodiodes, obtained by aluminium (Al) ion-implantation on low doped n-type epilayers are widely characterized observing an extremely low dark current density 10 3. The absence of optically active defects and pairs recombination centers was monitored by electro-optical and Emission Microscopy measurements.