Large Area Visible Blind 4H-SiC P+/N UV Photodiode Obtained by Aluminium Implantation

Data di pubblicazione: 1 Gen 2016

ConvegnoFonte dati: ARCHIVIO

4H-SiC junction photodiodes, obtained by aluminium (Al) ion-implantation on low doped n-type epilayers are widely characterized observing an extremely low dark current density 10 3. The absence of optically active defects and pairs recombination centers was monitored by electro-optical and Emission Microscopy measurements.

Editore
Trans Tech Publications Ltd
Fonte
Materials Science Forum
ID archivio
c4ee1be631f40c6b999045f21eb2ce98
Riferimenti
Volume: 858 Pages: 1019-1022