Interaction between dislocations and He-implantation-induced voids in GaN epitaxial layers

Data di pubblicazione: 18 Mag 2005

RivistaFonte dati: OPENALEXTipo OpenAlex: articleAccesso chiuso
Autori: Daniel Alquier, Corrado Bongiorno, Fabrizio Roccaforte, VITO RAINERI

In this letter, we demonstrate that helium high-dose implantation is able to produce voids in GaN and we describe the behavior of material dislocations under these conditions. Two main types of nanovoids are encountered after annealing: cylindrical and pyramidal nanovoids. During their thermal evolution, these vacancy-type defects are interacting with dislocations favoring their local annihilation. The experimental results demonstrate a short-range interaction between nanovoid layer and dislocations, thus having potential applications for the improvement of GaN epitaxial layers quality.

Editore
American Institute of Physics
Fonte
Applied Physics Letters
Volume
86
Fascicolo
21
Citazioni
23
ID archivio
4cac6b169436dc5932c2103429214bc7
Riferimenti
Volume: 86 Issue: 21 Pages: 211911