High-level incorporation of antimony in germanium by laser annealing

Data di pubblicazione: 15 Dic 2010

RivistaFonte dati: ARCHIVIO
Autori: Elena Bruno

In this work we investigate pulse laser annealing as an alternative approach to reach high-level incorporation of Sb in substitutional location in crystalline germanium. Laser irradiation is demonstrated to recover also those structural defects, like honeycomb structures, that form during high-fluence heavy-ion implantations in Ge and that cannot be eliminated by conventional thermal treatments. Indeed, concentrations of substitutional Sb higher than 1×1021 at./cm3 have been obtained, well above the solid solubility of Sb in Ge. The strain induced on the Ge host lattice is also investigated, evidencing that the obtained Sb doped Ge layer is pseudomorphic to the Ge substrate while positively strained by the substitutional Sb atoms present within the Ge matrix. The kinetics of this Sb-rich Ge alloy phase is finally investigated, showing that most of Sb goes out of lattice with increasing the annealing temperature up to 488 …

Editore
American Institute of Physics
Fonte
Journal of Applied Physics
ID archivio
3bf3ee8d0ac45e225ba3906f42eea1a3
Riferimenti
Volume: 108 Issue: 12 Pages: 124902