Monolithic fully integrated programmable micro diffraction gratings based on electro-optical materials

Data di pubblicazione: 18 Mag 2007

RivistaFonte dati: ARCHIVIO

In the last few years Programmable Micro Diffraction Gratings (PMDG) have shown the possibility to be applied in many areas, spanning from imaging, to telecommunication, to spectroscopy. These devices were mainly based on Micro-Electro-Mechanical Systems (MEMS) techniques and realized by moveable mirrors and pop-up structures. Although this approach have held a central stage in Micro-Opto-Electro-Mechanical-Systems (MOEMS), they made the realized devices delicate and not useful for ...

Fonte
Proc of SPIE
ID archivio
8b5fd44c6812207276c08f7b276984eb
Riferimenti
Volume: 6593 Pages: 37-47