Monolithic fully integrated programmable micro diffraction gratings based on electro-optical materials
Data di pubblicazione: 18 Mag 2007
RivistaFonte dati: ARCHIVIO
In the last few years Programmable Micro Diffraction Gratings (PMDG) have shown the possibility to be applied in many areas, spanning from imaging, to telecommunication, to spectroscopy. These devices were mainly based on Micro-Electro-Mechanical Systems (MEMS) techniques and realized by moveable mirrors and pop-up structures. Although this approach have held a central stage in Micro-Opto-Electro-Mechanical-Systems (MOEMS), they made the realized devices delicate and not useful for ...