Record Capacitance Density from Three-Dimensional Silicon-Based Capacitor: Toward Effective on-Chip Energy Storage

Data di pubblicazione: 1 Mag 2020

RivistaFonte dati: OPENALEXTipo OpenAlex: conference-abstractAccesso chiuso
Autori: Lucanos Marsilio Strambini, Alessandro Paghi, Stefano Mariani, Anjali Sood, Jesse Kalliomäki, Paivi Jarvinen, Fabrizio Fausto Renzo Toia, Mario Scurati, Marco Morelli, Alessio Lamperti, Giuseppe Barillaro

The currently growing request for a continuous connectivity between people and things has increased exponentially the demand for portable and/or wearable electronics. Thus, high performance components with more compact size, lower power consumption, and increased energy storage capability are needed. Although electronic active components have downscaled and and their performance optimized over the years, passive elements (e.g., resistors, capacitors, and inductors) have made only little progress.Supercapacitors (SCs) are electrochemical capacitors that can achieve very high capacitance density, in the order of 0.1–1 mF/mm2. Nonetheless, SC intrinsic low operation voltage (a few Volts) and reduced frequency range (up to a few hundreds of Hertz), together with their poor compatibility with integrated circuit (IC) processes have inhibited their electronic applications to date1. Dielectric …

Editore
IOP Publishing
Fonte
ECS Meeting Abstracts
Volume
MA2020-01
Fascicolo
1
Pagine
22
Citazioni
0
ID archivio
74f0242f814677119e5f8319ee7ffb14
Riferimenti
Issue: 1 Pages: 22