All rights reserved. No part of contents of this paper may be reproduced or transmitted in any form or by any means without the written permission of Trans Tech Publications Ltd, www.scientific.net. (#528286773, Google Scholar, Switzerland-07/01/20,10:03:41) … 184 Gettering and Defect Engineering in Semiconductor Technology IX … 186 Gettering and Defect Engineering in Semiconductor Technology IX … 188 Gettering and Defect Engineering in Semiconductor Technology IX