Hydrogenated amorphous silicon based light-addressable potentiometric sensor (LAPS) for hydrogen detection

Data di pubblicazione: 2 Dic 1993

RivistaFonte dati: ARCHIVIO

Light-addressable potentiometric sensors (LAPS) based on metal/amorphous silicon/insulator structures, with Pd gate electrodes, have been fabricated and successfully operated as hydrogen sensors. The device response show a very good reproducibility and high stability allowing the possibility to detect a very low H2 concentration.

Editore
North-Holland
Fonte
Journal of non-crystalline solids
ID archivio
1a3fcd42bb7e70f69a228859001d8bdd
Riferimenti
Volume: 164 Pages: 793-796