Hydrogenated amorphous silicon based light-addressable potentiometric sensor (LAPS) for hydrogen detection
Data di pubblicazione: 2 Dic 1993
RivistaFonte dati: ARCHIVIO
Light-addressable potentiometric sensors (LAPS) based on metal/amorphous silicon/insulator structures, with Pd gate electrodes, have been fabricated and successfully operated as hydrogen sensors. The device response show a very good reproducibility and high stability allowing the possibility to detect a very low H2 concentration.