Electro-Optical Modulating Multistack Device Based on the CMOS-Compatible Technology of Amorphous Silicon

Data di pubblicazione: 1 Gen 2011

LibroFonte dati: OPENALEXTipo OpenAlex: book-chapterAccesso chiuso
Autori: Sandro Rao, Francesco Giuseppe Della Corte, Caterina Summonte

In this paper we report results on a field-effect induced light modulation at λ= 1.55 um in a high-index-contrast waveguide based on a multisilicon-on-insulator (MSOI) platform. The device is realized with the hydrogenated amorphous silicon (α-Si: H) technology and it is suitable for monolithic integration in a CMOS Integrated Circuit. The device exploits the free carrier optical absorption electrically induced in the semiconductor core waveguide. The dynamic behaviour of the device was experimentally and theoretically analyzed in presence of a visible illumination showing a link between the photogeneration and the free carriers provided by doped α-Si: H layers.

Fonte
Lecture notes in electrical engineering
Pagine
285-289
Citazioni
2
ID archivio
7238cbddd10d444ba44c450c56e4b6ea
Riferimenti
Pages: 285-289