A SnO2 microsensor device for sub-ppm NO2 detection
Data di pubblicazione: 21 Set 1999
RivistaFonte dati: ARCHIVIO
Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology.