A SnO2 microsensor device for sub-ppm NO2 detection

Data di pubblicazione: 21 Set 1999

RivistaFonte dati: ARCHIVIO

Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology.

Editore
Elsevier
Fonte
Sensors and Actuators B: Chemical
ID archivio
3f4c436698350a53fe9d8df5162baeb3
Riferimenti
Volume: 58 Issue: 1-3 Pages: 552-555