Page 1. *IEEE ~'LECTRON EVICES OCIETY 14 IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2006 Conference Chair Kyiochi Suguro Toshiba Europe Zsolt Nenyei Mattson Technology Regional Chairs: America Bo Lojek ATMEL Far East Bunji Mizuno Ultimate Junction Technologies Conference Committee: Phillipe Absil IMEC Pei-Feng Hsu Florida IT. Babak Adibi Ultratech Amitabh Jain Texas Instruments Jeff Gelpey Mattson Technology Robert James INTEL Aaron Hunter Applied Materials Wolfgang Skorupa FZ-Rossendorf Wilhelm Kegel Infineon Aomar Halimaoui STMicroelectronics Jim Nakos IBM Kentaro Shibahara Hiroshima University Hiroshi Iwai Tokyo IT Karuppanan Sekar SemEquip Mark Liu INTEL Lis Nanver TU Delft Vittorio Privitera IMM-CNR Julien Venturini SOPRA Masataka Kase Fujitsu Jeff Kowalski DSG Technologies Vikram Singh Varian …