Strain relaxation in graded composition buffer layers

Data di pubblicazione: 1 Nov 1999

RivistaFonte dati: ARCHIVIO

A model to compute the strain relaxation rate in InxGa1−xAs/GaAs single layers has been tested on several compositionally graded buffer layers. The existence of a critical elastic energy has been assumed as a criterion for the generation of new misfit dislocations. The surface strain accuracy results are within 2.5×10−4. The influence of different grading laws and growth conditions on residual strain, threading dislocation density, misfit dislocation confinement, and surface morphology has been studied. The probability of dislocation interaction and work hardening has been shown to strongly influence the mobility and the generation rate of the dislocations. Optimization of the growth conditions removes residual strain asymmetries and smoothes the surface roughness.

Editore
American Institute of Physics
Fonte
Journal of applied physics
ID archivio
b4ac7a1bc36699c251ba966d58524355
Riferimenti
Volume: 86 Issue: 9 Pages: 4748-4755