A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers

Data di pubblicazione: 1 Ott 2006

conference-paperFonte dati: OPENALEXTipo OpenAlex: conference-paperAccesso chiuso
Autori: Fulvio Mancarella, Alberto Roncaglia, Fabrizio Tamarri, Ivan Elmi, Gian Carlo Cardinali, M. Severi

We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.

Fonte
2006 5th IEEE Conference on Sensors
Volume
46 47
Pagine
1235-1238
Citazioni
0
ID archivio
1872564eba13257e465c39940510f4bd
Riferimenti
Pages: 1235-1238