Forward current of Al+ implanted 4H-SiC diodes: A study on periphery and area components

Data di pubblicazione: 1 Gen 2016

ConvegnoFonte dati: ARCHIVIO

The temperature dependence of the bulk and periphery forward current components of vertical 4H-SiC p+-in diodes, with Al+ implanted circular anodes of diameters in the range 150-1000 mm, have been obtained from the analysis of the results of forward current-voltage measurements in the temperature range 30-290 C. The zero voltage bulk and periphery current densities at different temperatures have been used to compute the temperature dependence of:(i) the effective carrier lifetime in the space charge region,(ii) the minority carrier diffusion coefficient to lifetime ratio in the base region, and (iii) a surface quality parameter.

Editore
Trans Tech Publications Ltd
Fonte
Materials Science Forum
ID archivio
0567b4f10cf2e6b6a89841d6ba379688
Riferimenti
Volume: 858 Pages: 773-776