High Temperature Etching for Threading Dislocation Investigation on GaN Epi-Layer | IMM Container

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High Temperature Etching for Threading Dislocation Investigation on GaN Epi-Layer

Type:

Conference

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

1 Jan 2022

Authors:

Ruggero Anzalone, Giuseppe Greco, Fabrizio Roccaforte, Patrick Fiorenza, Nicolò Piluso, Andrea Severino

Biblio References:

Volume: 1062 Pages: 18-22

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…