Iso-concentration study of atomistic mechanism of B diffusion in Si

Data di pubblicazione: 1 Apr 2007

RivistaFonte dati: ARCHIVIO
Autori: Giuliana Impellizzeri, Salvo Mirabella

B diffuses in crystalline Si by reacting with Si self-interstitial (I) with a frequency g, forming a BI complex that can migrate for an average length λ. We experimentally measured both g and λ as a function of the hole concentration p by means of iso-concentration experiments on B delta-layers both under p- and n-doping conditions. On the basis of these data, we propose a comprehensive model that fixes the interplay among free charge, I and BI charge states that determines the B diffusion. Pairing effect with donors was also considered.

Editore
North-Holland
Fonte
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
ID archivio
716def80bb31c519a9b842d29554352d
Riferimenti
Volume: 257 Issue: 1-2 Pages: 165-168