Monte Carlo study of morphological surface instabilities during misoriented epitaxial growth of cubic and hexagonal polytypes

Data di pubblicazione: 1 Gen 2010

RivistaFonte dati: OPENALEXTipo OpenAlex: conference-paperAccesso chiuso
Autori: Massimo Camarda, A. Severino, A. LaMagna, Francesco La Via, Gabriel Ferro, Paul Siffert

In this article, using kinetic Monte Carlo simulations, we study two morphological instabilities, namely step bunching and step meandering, that are known to occur during the epitaxial growth of Silicon Carbide on misoriented substrates. Specifically, we analyze the simulated final, i.e. after the growth process, step roughness (related to the step meandering instability) as function of the growth and temperature during growth of cubic SiC polytype for substrates with miscut towards the [110] and [112̄] directions and compare these results with recent experimental findings. We also study the simulated final terrace width distribution (related to the step bunching instability) as function of the substrate polytype finding that the cubic polytype does not suffer of neither the geometrical nor the energetic surface instability. For this reason the cubic polytype, showing a better planarity, could be a good candidate for subsequent …

Editore
American Institute of Physics
Fonte
AIP Conference Proceedings
Pagine
19-22
Citazioni
3
ID archivio
48e43aeb2477aedb3eaeaa6b8ee57d27
Riferimenti
Volume: 1292 Issue: 1 Pages: 19-22