A new apparatus for electron tomography in the scanning electron microscope

Data di pubblicazione: 1 Gen 2015

RivistaFonte dati: OPENALEXTipo OpenAlex: conference-paperOpen Access
Autori: Vittorio Morandi, M. Del Marro, Piera Maccagnani, Luca Masini, Andrea Migliori, Luca Ortolani, G. Pallocca, Alessandro Pezza, Marco Rossi, Giorgio Sberveglieri, M. Vittori-Antisari, Marco Vittori-Antisari, P. Vinciguerra, Matteo Ferroni

The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose. © 2015 AIP Publishing LLC.

Fonte
AIP conference proceedings
Volume
1667
Pagine
020013
Citazioni
2
ID archivio
c90057458346085b54716d7bf52e8a32
Riferimenti
Volume: 1667 Issue: 1 Pages: 020013