Radiation enhanced diffusion of B in crystalline Ge

Data di pubblicazione: 26 Feb 2010

RivistaFonte dati: ARCHIVIO
Autori: Antonio Terrasi, Elena Bruno, Salvo Mirabella, Giuliana Impellizzeri

In this work we propose an alternative methodology to study B diffusion in crystalline Ge. We enhance B diffusion by means of passing implants in such a way to increase the point-defects distribution through the sample, well above the equilibrium value. A comparison between B diffusion occurring under implantation with different ions or after post-implantation annealing allowed to discern any possible role of ionization effects on B diffusion. Indeed, B diffusion is demonstrated to occur through a point-defect-mediated mechanism. The diffusion mechanism is hence discussed. These results are a key point for a full comprehension of the B diffusion in Ge.

Editore
Elsevier
Fonte
Thin Solid Films
ID archivio
37bb57c0f25f1bba60d5f5f0ab4952e1
Riferimenti
Volume: 518 Issue: 9 Pages: 2386-2389