RF MEMS fabrication in LTCC technology

Data di pubblicazione: 30 Mag 2016

ConvegnoFonte dati: ARCHIVIO

RF MEMS in Low-Temperature Co-fired Ceramics (LTCC) technology have been designed, manufactured and tested for potential utilization in reconfigurable space sub-systems. Specifically, single-pole-single-throw (SPST) and single-pole-double-throw (SPDT) ohmic switch configurations have been studied for wide-band applications. Advantages coming from the measured RF performances and from the integration of RF MEMS by means of the LTCC technology only, to be used also for packaging, are discussed.

Editore
IEEE
Fonte
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
ID archivio
1d117b32bd7c91bb02087209c68ef774
Riferimenti
Pages: 1-5