The Institute for Microelectronics and Microsystems

The Institute for Microelectronics and Microsystems (IMM), belonging to the Physics and Matter Technologies Department of CNR, is organized in 7 Sections, located in Agrate Brianza (Mi), Bologna, Rome, Naples, Lecce and two Sections in Catania (the Headquarters and at the Univ. of Catania). The Institute has a permanent staff of 195 people (117 of them Researchers) and a temporary staff including 47 post-docs and 61 PhD students.

The research activity is focused on innovative solutions for micro and nanoelectronics, advanced materials and processes for smart components, optoelectronics and photonics, sensors and multifunctional micro/nanosystems. In particular, the main research areas are:

  1. Nanostructured materials (Graphene and two dimensional materials beyond graphene, Semiconductor nanowires and nanomaterials, Oxide and metal nanostructures, Self-assembled nanosystems)
  2. Materials and devices for Information Storage and Processing (Advanced contact schemes and doping strategies,  Spintronic Devices, Nanomaterials for phase change memories, Memristive devices and neuromorphic computing, Quantum Information Processing)
  3. MEMS and MOEMS (Metamaterials for RF and microwave applications, SiC films for sensors or free-standing MEMS structures, RF-MEMS switches, Silicon flexural resonators for strain sensors)
  4. Flexible and Large area electronics (Inorganic flexible electronics, Graphene based devices, Organic electronics, Low temperature inorganic films for flexible sensors)
  5. Materials and processes for RF and Power devices  (hetero-epitaxial growth of 3C-SiC on Si, processing development for SiC and GaN devices)
  6. Energy conversion devices (Materials for 3rd generation solar cells, including silicon nanodots and nanowires, graphene, perovskites, Ultra-thin transparent and conductive films, 3C-SiC, Plasmonics, nano-rectenna)
  7. Photonic materials and devices (Silicon photonics, Biomimetics and  metamaterial-based devices for hybrid integration, Fiber optic based devices)
  8. Sensors and multifunctional micro/nanosystems (Materials for sensing technology, Components for multifunctional sensing systems, Integrated smart multifunctional micro/nanosystems)
  9. Micro and Nanoscale characterization and imaging (Electron Microscopy Techniques, Scanning Probe Techniques, Light Microscopy Techniques, X-Rays and Ion beam techniques)
  10. Theory, numerical simulation and modelling (Theory of coherent and correlated quantum systems, Density Functional Theory and ab-initio simulations, Simulations of processes and devices from the meso- to the macro-scale)  

IMM activities span from material science and process development to device fabrication and system integration, thanks to the micro-nanofabrication facilities present at the different sites (clean-room areas totaling >1400 m2). Through the participation to many European projects, IMM benefits from collaboration with prestigious international research institutions, such as Laboratoire d'Electronique de Technologie et d'Instrumentation (LETI), Interuniversity MicroElectronics Center (IMEC), European Synchrotron Radiation Facility (ESRF), Centro Nacional de Microelectrónica (CNM), and with many semiconductor industries, including STMicroelectronics (ST), Micron, Philips, SILVACO, AMD, Tower Semiconductor and Siemens. Particularly effective is the collaboration with STMicroelectronics, with two IMM Sections embedded in ST plants in Catania and Agrate Brianza, allowing the successful development of public-private initiatives. Furthermore, IMM has a close collaboration with many Universities (one of its Section being located within the Physics Dept. of the University of Catania) and also carries out an important role in the formation, coordinating many PhD and graduate student activities. As a result, IMM effectively bridges the Academic Institution research activities with the Industrial applications, as also clearly demonstrated by the location of some IMM Sections. It should be underlined that the strong interaction with companies does not prevent, but often promotes the development of basic research activities. Indeed, some challenges in nanoelectronics require “More than Moore” solutions, with expected long-term practical applications. The Institute is active in many  emerging fields related to nanotechnologies (low-dimensional systems, new materials for memories and spintronics, graphene, etc.), sometime generating  innovative know-hows also for non-electronic applications.
Due to the strong industrial interaction, IMM research programs include also specific aspects addressed by the Industrial partners. Particularly relevant is the participation to the projects, led by ST, and funded through the European Regional Development Fund (ERDF) regarding: the development of flexible electronics for smart disposable systems (PLAST_ICs); power electronics based on SiC and GaN for the control and conversion of electric power for automotive and industrial applications (AMBITION POWER); third generation photovoltaics (ENERGETIC); new PV-technologies for smart systems integrated in buildings; micro and nanotechnologies for advanced biomedical systems (HIPPOCRATES). Another relevant ERDF funded project is the Public-Private Partnership for research, development and validation of innovative technologies and services for Ambient Assisted Living (INNOVAAL). IMM also collaborates with Alenia Aermacchi on several projects related to aerospace and is partner of a number of Technological Districts, stimulated by the Italian Ministry for University and Research. IMM is member of the Technological Districts “Micro and Nanosystems” in Sicily, “Hi-MECH (high mechanic technology)” in Emilia Romagna and the Aerospace District of the Campania.
IMM coordinates or is partner of several European projects and among these are worth mentioning those on: water control (AQUASYSTEM) and the application of nanotechnology for water treatments (WATER); graphene and 2D semiconductors (EU GRAPHENE FLAGSHIP, 2D-NANOLATTICES); MEMS for detection of illicit substances (DOGGIES, DIRAC); microelectrode arrays for brain signal recording and stimulation (CORTICONIC); synthesis and functionality of chalcogenide nanostructures for phase change memories (SYNAPSE); self-assembled structures for nanometrology and nanostructured devices (CRYSTAL,TREND); organic electronics (COSMIC), volumetric scanning microwave microscopy for non-destructive 3D nanoscale structural characterization (V-SMMART NANO); energy for a green society: from sustainable harvesting to smart distribution: equipments, materials, design solutions and their applications (ERG, funded by ENIAC JTU); development of a critical mass of Ambient Assisted Living applications, products and services (ReAAL); innovation for age-friendly environments in the European Union (AFE-INNOVNET) ); the ERDF funded projects on smart systems enabling services to assist individuals in monitoring their health conditions (AA@H), treatment and aids for domestic healthcare (BAITAH) and remote rehabilitation system for Alzheimer patients (ALTRUISM). Thanks to the project Beyond-Nano, also funded by ERDF, IMM has recently installed a sub-Angstrom ARM200F Scanning TEM, which, thanks to its exceptional features, makes the facility one the most powerful tool for structural analysis in Europe.
IMM has an annual operating budget, averaged over the last three fiscal years,  around €24 million, including €9.8 million of personnel costs and €1.4 million of running costs supported by CNR and €12.8 million arising from European Regional Development Funds, European, International, National projects and Industrial research contracts (see the pie chart below)

Distribution of external annual funding (averaged over the period 2011-2013)


Scientific results are presented to many International Conferences and more than 220 articles are published by IMM researchers on JCR journals every year. 

Number of articles published on JCR Journals per year

Unlocking Scrolls Preserved in Eruption of Vesuvius, Using X-Ray Beams

This papyrus scroll, which survived the volcanic destruction of the Roman town of Herculaneum in A.D. 79

Researchers have found a key that may unlock the only library of classical antiquity to survive along with its documents, raising at least a possibility of recovering vanished works of ancient Greek and Roman authors such as the lost books of Livy’s history of Rome.

The library is that of a villa in Herculaneum, a town that was destroyed in A.D. 79 by the eruption of Mount Vesuvius that obliterated nearby Pompeii. Though Pompeii was engulfed by lava, a mix of superhot gases and ash swept over Herculaneum, preserving the documents in a grand villa that probably belonged to the family of Lucius Calpurnius Piso Caesoninus, the father-in-law of Julius Caesar.

Though the hot gases did not burn the many papyrus rolls in the villa’s library, they turned them into cylinders of carbonized plant material. Many attempts have been made to unroll the carbonized scrolls since they were excavated in 1752. But all were highly destructive, and scholars eventually decided to leave the scrolls alone in the hope that better methods would be invented. More than 300 scrolls survive more or less intact, with many more fragments.

Researchers led by Vito Mocella, of the Institute for Microelectronics and Microsystems in Naples, Italy, now say that for the first time, they can read letters inside the scrolls without unrolling them. Using a laserlike beam of X-rays from the European Synchrotron in Grenoble, France, they were able to pick up the very slight contrast between the carbonized papyrus fibers and the ancient ink, soot-based and also made of carbon.

The contrast has allowed them to recognize individual Greek letters from the interior of the roll, Dr. Mocella’s team reported on Tuesday in the journal Nature Communications. “At least we know there are techniques able to read inside the papyri, finally,” Dr. Mocella said in an interview. “If the technology is perfected, it will be a real leap forward,” said Richard Janko, a classical scholar at the University of Michigan who has translated some of the few scrolls that can be read.

The 24 letters of the Greek alphabet could be read inside the rolled scroll via the phase-contrast technique


Even though the current scans are mostly a proof of concept, the work suggests that there will soon be a way to read the full works on the rolled scrolls, the team says. “We plan to improve the technique,” says Mocella. “Next spring we have an allowance to spend more time at the Grenoble synchrotron, where we can test a number of approaches and try to discern the exact chemical composition of the ink. That will help us improve the energy setting of the beam for our scan.”

The Mocella team’s work is the second recent advance in reading the Herculaneum scrolls. In 2009, Brent Seales, a computer scientist at the University of Kentucky, succeeded in delineating the physical structure of a Herculaneum scroll by X-ray-computed tomography, a process similar to a CT scan. The layers of papyrus wound up inside the scroll are highly ruffled and irregular because the hot gases liberated all the water from the fibers as well as carbonizing them.

The Mocella team’s method visualizes letters free floating inside the scroll, but each letter will need to be assigned to its correct place on Dr. Seales’s surface before the letters can form words. Dr. Seales and Dr. Mocella worked with Herculaneum scrolls acquired by Napoleon in 1802 and belonging to the Institut de France in Paris.

This is absolutely a major step forward,” Dr. Seales said of the Mocella report. “These guys are focused on showing the imagery with best contrast. But to really read the papyrus, you need to untangle its surface, which is the active area of my work.


News ed Eventi

European School on Crystal Growth (ESCG) 2015
GraphITA 2015

A Multidisciplinary and Intersectorial workshop on Synthesis, Characterization and Technological Exploitation of Graphene


2nd Circular :

Wodim 2016

19th Workshop on Dielectrics in Microelectronics (WoDiM 2016)

June 27-30, 2016

Hotel Baia Verde, Catania (Italy)

link: http://wodim2016.imm.cnr.it/


Carlo Gavazzi Space
Thales Aerospace


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  • Da: Lun, 17/10/2016 - 04:34