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Type: 
Conference
Description: 
A complete vector-2D micro-integrated sensors system for magnetic field measurement is proposed. The system consists of a micro-integrated Fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is the VITROVAC 6025X deposited over the micro-integrated coils with the RF magnetron sputtering process deposition.
Publisher: 
Publication date: 
1 Sep 2005
Authors: 

A Baschirotto, F Borghetti, E Dallago, P Malcovati, M Marchesi, E Melissano, G Venchi, P Siciliano

Biblio References: 
Pages: 11-14
Origin: 
EUROSENSORS XIX