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In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 μm thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are parallel plate capacitors with the top electrode properly patterned to allow analytes diffusion into the dielectric that acts as chemical interactive material. Three different polymers, poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene (BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin film transistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. The electronic tests show oscillating frequencies of about 211 ± 2 kHz and negligible frequency shifts under different bending radius conditions. Furthermore, system …
Publication date: 
20 Jul 2011

E Zampetti, L Maiolo, A Pecora, F Maita, S Pantalei, A Minotti, A Valletta, M Cuscunà, A Macagnano, G Fortunato, A Bearzotti

Biblio References: 
Volume: 155 Issue: 2 Pages: 768-774
Sensors and Actuators B: Chemical