In this work we report on the development of back-gated carbon nanotube-field effect transistors (CNT-FETs), with CNT layers playing the role of the channel, and on their electrical characterisation for sensing applications. The CNTs have been deposited by electrophoresis on an interdigitated electrode region created on a SiO 2/Si substrate. Different kinds of CNTs have been used (MWCNTs by arc discharge in liquid nitrogen and MWCNTs by chemical vapour deposition, CVD) and the electrical characterisation of the devices was performed in a NH 3-and NO 2-controlled environment. Preliminary data have shown an increase in the channel resistance under NH 3 exposure, whereas a decrease is observed after exposure to NO 2, and the sensitivity to each gas depends on the kind of CNTs used for the device. Furthermore, the defect formation by Si ion implantation on CNTs was investigated by high-resolution transmission electron microscopy (TEM) and Raman analysis. The behaviour observed for the different devices can be explained in terms of the interaction between structural or chemical defects in CNTs and the gas molecules.
4 Feb 2015
Volume: 4 Issue: 1 Pages: 25-30
Journal of Sensors and Sensor Systems