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In this paper, we propose a UV-A sensor based on a 6H-SiC Schottky photodiode with a thin Ni 2 Si front electrode and an integrated hydrogenated silicon nitride (SiN:H) dielectric filter. 6H-SiC prototypes were fabricated by using a manufacturing process to a large extent already implemented on 4H-SiC poly-type for the realization of a high signal-to-noise ratio ultraviolet (UV) sensor already commercialized. The results obtained on 6H-SiC prototypes show optimal electrical performance with dark current density lower than 0.2 nA/cm 2 at room temperature and 10 V reverse bias. The use of 6H polytype allows shifting of the UV sensor response from 290 nm peak responsivity wavelength measured on standard 4H-SiC photodiodes to 360 nm wavelength in 6H-SiC prototypes with an integrated SiN:H filter exactly in the middle of the UV-A band (320-400 nm) with a simultaneous consistent reduction of the optical …
Publication date: 
11 Jan 2017

Antonella Sciuto, Massimo Cataldo Mazzillo, Salvatore Di Franco, Giovanni Mannino, Paolo Badalà, Lucio Renna, Corrado Caruso

Biblio References: 
Volume: 9 Issue: 1 Pages: 1-10
IEEE Photonics Journal