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In this work, we investigated four possible mechanisms which were candidates to explain the shape of boron profiles after ion implantation and melting excimer laser annealing in silicon. A laser with a wavelength of 308 nm and a pulse duration of ∼180 ns was used. To simulate this process, an existing model for the temperature and phase evolution was complemented with equations for the migration of dopants. Outdiffusion, thermodiffusion, segregation, and adsorption were investigated as possible mechanisms. As a result, we found that outdiffusion and segregation can be excluded as major mechanisms. Thermodiffusion as well as adsorption could both reproduce the build-up at low melt depths, but only adsorption the one at deeper melt depths. In both cases, ion beam mixing during SIMS measurement had to be taken into account to reproduce the measured profiles.
American Institute of Physics
Publication date: 
6 Nov 2012

Moritz Hackenberg, K Huet, R Negru, J Venturini, G Fisicaro, A La Magna, Peter Pichler

Biblio References: 
Volume: 1496 Issue: 1 Pages: 241-244
AIP Conference Proceedings