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We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 /spl mu/m using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding layer, for low cost waveguide applications.
Publication date: 
22 Jun 2005

RL Oliveri, A Sciuto, S Libertino, G D'Arrigo, C Arnone

Biblio References: 
Pages: 265-270
Proceedings of 2005 IEEE/LEOS Workshop on Fibres and Optical Passive Components, 2005.