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Type: 
Conference
Description: 
Article PreviewArticle PreviewArticle PreviewThis study refers, through different microscopies, about the carbonization effects on differently oriented Si surfaces. A statistical study on the relationship between some process parameters (such as temperature, process time) and void dimensions and density, for three Si substrate orientations, is reported.
Publisher: 
Trans Tech Publications
Publication date: 
1 Jan 2009
Authors: 

Andrea Severino, Corrado Bongiorno, Ruggero Anzalone, Giuseppe Abbondanza, Marco Mauceri, Giuseppe Condorelli, Gaetano Foti, Francesco La Via

Biblio References: 
Volume: 600 Pages: 215-218
Origin: 
Materials Science Forum