Type:
Conference
Description:
In this work a new epitaxial process on 6 inches has been performed on 2 off-cut substrate. This off-cut will reduce the material loss during substrate preparation from the crystal boule. The thickness and doping uniformity of the samples grown in the LPE reactor PE1O6 is extremely good and the PL map shows a low defects density. The roughness is slightly higher on 2 off-cut and the process window becomes narrower.
Publisher:
Trans Tech Publications Ltd
Publication date:
1 Jan 2015
Biblio References:
Volume: 821 Pages: 157-160
Origin:
Materials Science Forum