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The temperature dependence of the Hall hole density and the Hall mobility data of heavy doped p-type 4H-SiC(Al) materials obtained by Al+ ion implantation have been analysed in the frame of the charge neutrality condition and the relaxation time approximation. Samples with implanted Al concentrations in the range 1019–1020 cm−3 and 1950 °C/5 min conventional annealing have been taken into account. The reliability of the calculation has been critically discussed by focusing the attention on both the validity limits of the models for the impurity scattering mechanisms and the adopted Hall factor. By introducing empirical mass anisotropy factors, reasons were given in favour of a generalized use of the unique experimental evaluation of the Hall factor reported by the literature for p-type 4H-SiC, assessed for an Al acceptor density in the range of 1.8 × 1015 cm−3–2 × 1018 cm−3. The simultaneous fits of …
American Institute of Physics
Publication date: 
28 Dec 2013
Biblio References: 
Volume: 114 Issue: 24 Pages: 243703
Journal of Applied Physics