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Type: 
Journal
Description: 
A few recent applications of scanning transmission electron microscopy (STEM) methods to problems of interest for nanoelectronics are reported. They include nanometer-scaled dopant profiles by Z-contrast and strain mapping by convergent beam diffraction.
Publisher: 
The Electrochemical Society
Publication date: 
28 Sep 2007
Authors: 

Aldo Armigliato, Roberto Balboni, Andrea Parisini

Biblio References: 
Volume: 10 Issue: 1 Pages: 57-64
Origin: 
ECS Transactions