Microelectronic & Nanoelectronic Devices-Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation 022201 | IMM Container

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Microelectronic & Nanoelectronic Devices-Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation 022201

Type:

Journal

Description:

Publisher:

Publication date:

1 Jan 2011

Authors:

E Hourdakis, AG Nassiopoulou, A Parisini, MA Reading, JA van den Berg, L Sygellou, S Ladas, P Petrik, A Nutsch, M Wolf, G Roeder

Biblio References:

Volume: 29 Issue: 2

Origin:

Journal of Vacuum Science and Technology-Section B

Link:

http://scholar.google.com/scholar?cluster=14723993133127557905&hl=en&oi=scholarr