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Previous studies have shown that the electrical activation of a given implanted Al concentration in 4H-SiC increases with the increasing of the post implantation annealing temperature up to 1950–2100 C and different annealing times in the range 0.5–5 min. This study shows that, at 1950 C, the electrical activation of Al implanted in 4H-SiC increases with the increase of the annealing time up to attain saturation for annealing times longer than 22 min. Samples were obtained from the same Al implanted HPSI 4H-SiC wafer with an implanted Al concentration lower than the Al solubility limit in 4H-SiC at the annealing temperature of 1950 C. The annealing time was varied in the range 5–40 min.
IOP Publishing
Publication date: 
12 Aug 2016

P Fedeli, M Gorni, A Carnera, A Parisini, G Alfieri, Ulrike Grossner, R Nipoti

Biblio References: 
Volume: 5 Issue: 9 Pages: P534
ECS Journal of Solid State Science and Technology