-A A +A

Chapter 5-SiC Technology-5.2 Dielectrics and Passivation Layers-Competition between Oxidation and Recrystallization in Ion Amorphized (0001) 6H-SiC

Type: 
Journal
Description: 
Publisher: 
Aedermannsdorf, Switzerland: Trans Tech Publications, 1984-
Publication date: 
1 Jan 2005
Authors: 

A Poggi, A Parisini, S Solmi, R Nipoti

Biblio References: 
Volume: 483485 Pages: 665-668
Origin: 
Materials Science Forum
Link: 
http://scholar.google.com/scholar?cluster=2223613081227423019&hl=en&oi=scholarr

Scientific Productions