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The p-type doping of high purity semi-insulating 4H-SiC by Al+ ion implantation and a conventional thermal annealing of 1950 C/5 min has been studied for implanted Al concentration in the range of 1 x10 19-8 x 10 20 cm-3 (0.36 μm implanted thickness). Sheet resistance in the range of 1.6 x 10 4 to 8.9 x10 2 Ω, corresponding to a resistivity in the range of 4.7 x 10-1 to 2.7 x 10-2 Ωcm for increasing implanted Al concentration have been obtained. Hall carrier density and mobility data in the temperature range of 140–600 K feature the transition from a valence band to an intra-band conduction for increasing implanted Al concentration. The specific contact resistance of Ti/Al contacts on the 5 x10 19 cm-3 Al implanted specimen features a thermionic field effect conduction with a specific contact resistance in the 10-6 Ωcm2 decade.
Trans Tech Publications Ltd
Publication date: 
1 Jan 2013

Roberta Nipoti, Anders Hallén, Antonella Parisini, Francesco Moscatelli, Salvatore Vantaggio

Biblio References: 
Volume: 740 Pages: 767-772
Materials Science Forum