We report on a simple microsystem for the analytical quantification of benzene in parts per billion (ppb) concentration. The system is based on a commercial photoionization detector (PID) and a MEMS cartridge, filled with innovative supramolecular cavitand receptors. The heater integrated on the MEMS device enables fine tuning of its temperature and operating the cartridge as both purge-and-trap and gas chromatographic (GC) column. By means of a smart signal process algorithm based on fuzzy neural network (FNN) the system is able to exactly quantify benzene also in mixture containing others aromatic species. Functional characterization results are shown.
21 Jun 2015
2015 Transducers-2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)