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Type: 
Conference
Description: 
Article PreviewArticle PreviewArticle PreviewWe have investigated 3C-SiC layers grown on silicon and on poli-Si in order to realize test MEMS structures. The strain of the films were investigated by the fabrication of cantilevers, beams, springs and we successfully fabricated a Double-Ended-Tuning-Fork double clamped SiC resonator on the film, with perfectly aligned actuation electrode.
Publisher: 
Trans Tech Publications Ltd
Publication date: 
1 Jan 2012
Authors: 

Matteo Bosi, Giovanni Attolini, Bernard Enrico Watts, Alberto Roncaglia, Antonella Poggi, Fulvio Mancarella, Francesco Moscatelli, Luca Belsito, Matteo Ferri

Biblio References: 
Volume: 717 Pages: 897-900
Origin: 
Materials Science Forum