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Type: 
Patent
Description: 
A method for the production of a separation microcolumn made in silicon wafer (11), for a chromatographic or gas-chromatographic system, is described. According to the method, a micro-trench (14) is first made in the silicon wafer. The micro-trench extends in depth in the silicon wafer (11) and along the entire path of the microcolumn. Then, a perfectly circular micro-channel (20), tangent to the upper surface of the silicon wafer (11), is obtained by an in-depth isotropic etching with reactive ions in the micro-trench (14). The microcolumn is ...
Publisher: 
Publication date: 
11 Jul 2012
Authors: 

Fulvio Mancarella, Ivan Elmi, Stefano Zampolli, Antonella Poggi, Giancarlo Cardinalli, Maddalena Belluce, Stefano Galli, Mario Galli, Filippo Baravelli

Biblio References: 
Origin: 
US20140138351