In this paper we report on WO3 films deposited by thermal evaporation. Layers have been characterized by means of electron microscopy techniques, revealing a microstructure suitable for gas sensing applications. Functional characterization has been carried out towards NO2, NH3 and CO, revealing the capability of the material to detect NO2 concentrations lower than 100 ppb, with low cross-sensitivity towards CO and NH3.
1 Jan 2008
Sensors And Microsystems