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Type: 
Journal
Description: 
We present the design and the fabrication of an integrated hybrid optical sensor for liquid and gas sensing based on the anodic bonding technique. The device is composed by three distinct elements separately realised and then joined together: a planar SOI waveguide, a porous silicon micro‐chamber and a glass slide. The presence of a liquid or gaseous substance in the reaction chamber is revealed as a change in the propagation characteristic of the guided mode. In case of exposure to methanol, the preliminary experimental results show that the propagation of the laser beam, coupled into the SOI waveguide, has been efficiently modulated. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Publisher: 
WILEY‐VCH Verlag
Publication date: 
1 May 2007
Authors: 

L De Stefano, I Rea, L Rotiroti, L Fragomeni, FG Della Corte, I Rendina

Biblio References: 
Volume: 4 Issue: 6 Pages: 1946-1950
Origin: 
physica status solidi c