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Type: 
Book
Description: 
ConclusionFrom the DH analysis we have found an asymmetric behavior of the device, probably due to impurities presence in the air gap between the bride an substrate. These results show all potentialities of this non destructive inspection method, that it promise to have a very important role in the futures processes of dynamic MEMS characterization.
Publisher: 
Springer, Berlin, Heidelberg
Publication date: 
1 Jan 2006
Authors: 

Valerio Striano, Giuseppe Coppola, Pietro Ferraro, Domenico Alfieri, Sergio De Nicola, Andrea Finizio, Giovanni Pierattini, Romolo Marcelli

Biblio References: 
Pages: 662-666
Origin: 
Fringe 2005