Pyroelectric effect (PE) under humidity conditions from the -Z surface of Lithium Niobate (LiNbO 3 ) crystal was investigated using a Fan shape microheater fabricated on the +Z surface of the crystal. Thermal analyses of the microheater were performed using COMSOL multiphysics and thermal sensor respectively. A resistive Aluminum (Al) sensor was integrated along the microheater in order to control the temperature variation effect from the microheater.
9 Oct 2016
2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)